Fully automatic(robotic transfer) 4 point probe system

  • Product No:WS-8800
  • Manufacturer:Napson Corp.

WS-8800 is a Fully automatic(robotic transfer) 4 point probe system for silicon wafer by Napson.


  • Measurement of resistivity, thickness, conductivity(P/N) and temperature

  • Tester self-test function, wide measuring range

  • Thickness, measurement position and temperature correction function for silicon resistivity

  • Number of cassette station can be changed by customers request

  • Host (CIM) communication and SMIF or FOUP compatible
           


  • Sample sizes
    3 ~ 8 inch (or 12 inch)

  • Measuring range
    [R] 100μ~1M Ω・cm
    [RS] 1m~10M Ω/sq