The nSpec® is a fully automated, precision optical inspection system for viewing, analyzing and reporting on defects in opaque, transparent and semi-transparent wafers. Defect reports are fully customizable.
The nSpec® system can image and analyze:
Substrate wafers
Epi wafers
Patterned wafers
Diced wafers
Individual devices
The nSpec® system has multiple magnification settings making it easier for users to characterize defect types.
It also offers complete rapid scanning and wafer mosaicing.
Repeated quality control testing is easy to set up. There are settings for single image capture and scans. Configuration options include wafer size, defect types, and scan resolution.
Sample chucks are available to meet specific size needs and users can pair the system with an automated wafer loader to speed up throughput and decrease damaged wafers caused by operator-handling errors.
The system is delivered fully functional and includes installation and user training.
Optics
White light illumination：LED(other options available)
Brightfield/Darkfield Objectives：5,10,20 or 50x,user selectable
Differential Interference Contrast：(Nomarski)
Stage
Travel,typical：200mm X and Y direction
Precision Lead Screws：2 mm pitch, preloaded ball screws
Centered load capability：2.27 kg
Repeatability：+/- 5 μ
Construction：a) Precision ground alum plates
b) Stainless steel raceways
Step Size：0.04 μ
Travel flatness：30 μ
Weight：5.44 kg
Limit switches：Mechanical, non-adjustable
Wafer Vacuum Chuck (optional)：Adjustable to 50, 75, 100 or 150 mm
Camera
Pixel size,typical：4.54μ
Image size，typical：2752x2200 pixels
Maximum frame rate：17.4fps
Control
Stage Fully automated control for all system components.
Focus System allows for manual user operation.
Nosepiece
Illumination
Camera
Wafer Loader
Runs one cassette at a time：25 wafers/cassette
Standard Wafer Sizes：75, 100 or 150 mm
Dimension (width x length)：36 cm x 75 cm
Weight：34 kg
Minimum Vacuum Requirement：20 in. Hg
Power supply：110v/220v
Options
AFM:Specs available upon request
