Manual Mask Aligner

  • Product No:Model 200
  • Manufacturer:OAI INSTRUMENTS

The OAI Model 200 Mask Aligner is a cost-effective high performance mask Aligner that has been engineered with industry proven components that have made OAI a leader in the photolithography capital equipment industry. The Model 200 is a bench top mask Aligner that requires minimal cleanroom space. It offers an economic alternative for R&D, or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The system is capable of one micron resolution and alignment precision.

The alignment module features mask insert sets and quick-change wafer chucks that facilitate the use of a variety of substrates and masks without requiring special tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and Z-axis.

The Model 200 Mask Aligner features a dependable OAI UV light source which provides collimated UV light in Near or Deep UV using lamps ranging in power from 200 to 2000 watts. Dual-sensor, optical feedback loops are linked to the constant intensity controller to provide control of exposure intensity within ±2% of the desired intensity. Changes may be made to the UV wavelength quickly and easily. This mask Aligner is a flexible, economic solution for any entry-level mask alignment and UV exposure application.

  • Requires minimal clean room space

  • Causes minimal damage to fragile substrate materials

  • Accurate alignments to 1 micron

  • Easily accommodates a wide variety of substrates and masks

  • Backside mask alignment of IR transparent wafers with accuracy up to 3-5 microns

  • Highly collimated, uniform UV light

  • Quickly change the UV light wavelength

  • Exposure controlled intensity to ±2%

  • Can be configured as a Nano Imprint tool for NIL

  • Can be configured with a Microfluidics Module 


Substrate   Stage

X, Y Travel


Z Travel

1,500 microns


.001";   .0001"


or .01mm;   .001mm





Up to 9" x 9"


Beam Size

Up to 8"   square

Lamp Power

200, 350, 500,   1,000, and

2,000 Watt NUV

500, 1,000 and 2,000 Watt DUV

Shutter Timer


0.1 to 99.0   sec. at 0.1

second   increments

or 1 to 999   sec. at 1

second increments



110 or 220 vac

(or other   according to

Power Supply   requirements

and Country


20 - 28” Hg.

Air and N2



CDA at 60 PSI and N2at   40 PSI

.35” to .5” Water



37” (940mm)


31” (788mm”


25” (635mm)

Shipping Weight

250 Lbs.