PEGASUS PG2000D is develpoed for testing components such as DIODE, MOSFET, TVS and IGBT wafers.
PEGASUS PG2000D is a probe station with a double-sided, four-wire probe structure.
The structure eliminates impedance problem on the probe platform and minimizes the effect on test results.
It makes the component under test to be closer to the engineering design requirements.
X/Y axis
Frame: High accuracy ball cyclic bearing screw
Stroke: 210mmx210mm
Resolution:0.5 um
Accuracy:≤ ±7 um
Repetability:±4 um
Microscope:
Eyepiece:20x
Object lens:1x-4.5x
Magnification: 20x-90x
Test stage:
Material: High resistance artificial flagstone
Dimension: 3"/4"/5"/6"/8"
Theta axis:
Max. angle: 10 degree
Resolution: 0.001 degree