Model PG 101W Universal Analytical Probe Station
Feature:
Compact size, light weight, cost effective
Different type of probe and chuck available for several applications
Suitable for below 4” wafer
R&D centre and university lab suitable
Application:
LED wafer & chip charaterise
LD/PD and other optical electronical device charaterise
Discrete device / MEMS semiconductor device charaterise
Other composite functional material /ceramic material / semiconductor material charaterise
Specification:
• 4” Ni coating metal chuck
• 2”/3”/4” switchable vaccum lines
• X-Y travel range: 4” x 4”(10μm resolution)
• Z lift travel range: 10mm
• Chuck Theta adjustable(option)
• Support 4 micropositioners as Max.
• Size: 370mmWx370mmDx450mmH with Microscope
• Weight: 20kgs with Microscope
• Microscope specification:
Eyepiece range: 20
Objective magnification: 0.67 ~ 4.5
Min. view area: 2.7mm diameter
LED lighting
• Requirement: Power: AC 100~240V(50/60Hz)
Vacuum: -250 mmHg, 7 liter/min
Standard accessories:
• Magnetic type Micropositioner 2 pc
• BeCu probe 10 pc
Optional accessories:
• Gold coating metal chuck
• High voltage probe/chuck
• Low current/capacitance probe
• Measurement adapter
• Probe card holder/probe card
• Hot chuck (Ambient ~200。C)
• Anti-vibration table
• Shielding box
• Vaccum pump