The QS-1200 is used to test the SiC epitaxial layer thickness with FilmZ and PD EPI modules, where FilmZ is used to test SiC / SiC, Si / Si, III / V, SOI, MEMS, PR Test multi-layer SiC epitaxial layer with multi-point 12inch sample stage, direct test multi-point test patterns.
SiC film thickness test range 2um-250um
SiC film thickness test accuracy 0.01um, typical value
SiC Film Thickness Test Repeatability (3-sigma, 10 times) 3 nm (FilmZ), 1 nm (PD EPI)
Conventional film thickness test range 0.5um-1000um. And materials
High-strength water-cooled ceramic housing Mid-infrared light source Output spectral range 9600 cm-1 -50cm-1
KBr beam divider, mid-infrared flux 7500-375 cm-1
Spectral test range 6000cm-1 - 400cm-1 (1.7 um to 25 um)
Spectral resolution 0.5 cm-1 - 32 cm-1
Signal to noise ratio 50000: 1
Test time single point less than 5s
300mm multi-point test platform system software directly generate multi-point mapping, 2D and 3D graphics
Compatible with small size 2-8inch
Michelson interferometer, 60 ° air bearing structure
Splitter 2.25inch diameter
Incidence angle of 30 degrees