Non-contact measurement wafer sorting system (Belt drive tranceportation) 

  • Product No:NC-6800
  • Manufacturer:Napson Corp.

NC-6800 is a Non-contact measurement wafer sorting system (Belt drive tranceportation) by Napson.


  • Non-contact measurement of resistivity, thickness and conductivity (P/N)

  • Number of cassette station can be changed by customers request

  • Eddy current method for resistivity, Electric capacitance method for wafer thickness

  • Temperature correction for silicon wafer function
           


  • Sample sizes
    3 ~ 8 inch

  • Measuring range
    [R] 1m ~ 200Ω・cm
    [Thickness] 150 ~ 800μm (300μm between 150 and 800μm is recommended)

  • The range is separated from each Low, Middle, High and S-High probe type.