The nSpec® is a fully automated, precision optical inspection system for viewing, analyzing and reporting on defects in opaque, transparent and semi-transparent wafers. Defect reports are fully customizable.
The nSpec® system can image and analyze:
Substrate wafers
Epi wafers
Patterned wafers
Diced wafers
Individual devices
Optics
White light illumination：LED
Bright field/dark field objectives：5x and 10x, other magnifications optional
Differential interference contrast：Nomarski
Stage
Travel,typical：200mm X and Y direction
Precision Lead Screws：2 mm pitch, preloaded ball screws
Centered load capability：2.27 kg
Repeatability：
Construction：a) Precision ground alum plates
b) Stainless steel raceways with cross roller bearings
Step Size：0.04 μ
Travel flatness：30 μ
Weight：5.44 kg
Limit switches：Mechanical, non-adjustable
Wafer Vacuum Chuck (optional)： Adjustable to 50, 75, 100 or 150 mm
Camera
Pixel size,typical：4.54μ
Image size，typical：2752x 2200 pixels
Maximum frame rate：17.4fps
Control
Stage Fully automated control for all system components.
Focus System allows for manual user operation.
Nosepiece
Illumination
Camera
Wafer Loader
Runs one cassette at a time：25 wafers/cassette
Standard Wafer Sizes：75, 100 or 150 mm
Dimension (width x length)：36 cm x 75 cm
Weight：34 kg
Minimum Vacuum Requirement：20 in. Hg
Power supply：110v/220v
