Semiconductor
Semiconductor
Sheet Resistance/PN/Life Time

Fully automatic four point probe sheet resistance system

  • Product No:WS-3000
  • Manufacturer:Napson Corp.

WS-3000 is a fully-automatic 4 point probe sheet resistance/resistivity measurement system by Napson.


  • Automatic probe head selection(exchanger) among 4 kinds of probe head

    [No need to exchange a probe head by each different sample measurement]

  • Edge 1mm measurement is available by dual meas. mode

  • High cost performance from high speed measurement

  • FOUP compatible, GEM / SECS compatible
           

Selling Points

  • Automatic probe head selection(exchanger) among 4 kinds of probe head
    [No need to exchange a probe head by each different sample measurement]
  • Edge 1mm measurement is available by dual meas. mode
  • High cost performance from high speed measurement
  • FOUP compatible, GEM / SECS compatible


  • Sample sizes
    ~300mm(and/or Optional 200mm)

  • Measuring range
    [RS] 1m~10M Ω/sq
           

Image of Mapping

  • Full-automatic type with sample transfer system
  • Full-automatic type with sample transfer system


NAP-WS-3000
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