RT-3000/RG-1000F is a Fully automatic(robotic transfer) 4 point probe system for silicon wafer by Napson.
Fully automatic system for large sizes of flat panel with glass loading robot
Tester self-test function, Measurement position correction function, wide measurement range
Min. 0.1 mm meas. resolution and user programmable test pattern
Host (CIM) communication and 2-D/3-D Mapping software