The Nanometrics HL5500 is a turn-key, high performance Hall System for the measurement of resistivity, carrier concentration and mobility in semiconductors. Modular in concept, allowing easy upgrade paths, the system is suitable for a wide variety of materials, including silicon and compound semiconductors and metal oxide films
The system has both low and high resistivity measurement capabilities, with dual temperature capability and an optional cryostats extending the temperature range from below 90 K to 500 K. The computer is Microsoft® Windows™ based.
AC/DC measurement modes. The use of AC currents and phase sensitive detection eliminates thermal effects, long term drifts and significantly enhances signal-to-noise ratios. DC mode is useful when rate dependent trapping, rectification due to non-ohmic contacts or stray capacitances may affect AC currents
Van der Pauw, Hall Bar and Bridge measurements to ASTM F-76 standard
Simple probe system for convenient, fast sample throughput
Compact bench top design
Wide current range including auto-current facility in order to minimize sample heating
User defined electric field limitation to avoid impact ionization effects at low temperatures
Optional high impedance buffer amplifier/current source to extend sheet resistivity measurements to 1011 Ω/square
Software control of all measurement functions, data reduction and storage, text and graphical output to printer
Optional variable temperature capabilities:
a) Two-point, room temperature and 77 K
b) 90 K to 500 K liquid nitrogen cryostat
Rare earth permanent magnet giving excellent stability
Light-tight sample enclosure avoiding measurement errors due to photo generated effects
Probe system allowing rapid sample set-up for room temperature and 77 K assessment of wafers up to 3-inch diameter1
Extensive verification of measurement validity including contact checking algorithms
Electro-forming circuitry for contact formation
Current Source | Standard System | With HL5580 High Resistivity Buffer Amplifier/Current Source Module |
Range | 100 nA - 19.9 mA | 1 pA - 10 μA |
Compliance | 20 V | 20 V |
Output Impedance | 1010 Ω | >1013 Ω |
Voltage Measure | Standard System | With HL5580 High Resistivity Buffer Amplifier/Current Source Module |
Input Impedance | 1010 Ω | 1015 Ω in parallel with 3 pF input |
Input Voltage Operating Range | ±6 V | ±6 V |
Input Leakage Current | 20 nA per input (typical) | 40 fA per input (typical) |
Current Input Voltage Noise | 0.8 μV pk-pk at 0.1 - 10 Hz (typical) 15 nV/√Hz at 213 Hz | 4.0 μV pk-pk at 0.1 - 10 Hz (typical) |
Measurement Modes | AC (213 Hz)/DC | DC |
Sample Inputs | Coaxial | Two-lug female coaxial BNC with driven screen. Guard to input potential <100 μV |
Contact Switching | FET | Dry Reed |
Dimensions (Not including computer) | |
Measurement Head | 535 mm (W) x 700 mm (D) x 295 mm (H) |
Instrumentation Unit | 280 mm (W) x 400 mm (D) x 150 mm (H) |
Weight | |
Measurement Head including Magnet | 47.8 kg |
Instrumentation Unit | 90 kg |
