The RPMblue/FS is designed to provide fast, accurate, precise and reliable PL metrology across the entire wavelength range. This includes from high-Al content AlGaN alloys for GaN FET’s and UV lasers/LED’s to communication laser applications in the NIR and everything in between. The RPMblue/FS offers a catalogue of more than 15 standard lasers and the ability to fiber-feed a virtually unlimited array of sources.
The research grade 300 focal length monochromator can be fitted with up to three gratings and two array detectors — and, once configured, every optical component is selected under computer control. To ensure the highest possible wavelength accuracy, the RPMblue/FS contains its own built-in spectral source for monochromator calibration.
Standard Features
Wafer Sizes ≤ 200mm and sample pieces
up to 80 wph @ 2 mm spatial resolution on 2” wafers
Optional fully automated wafer handling with up to 3 cassette station
Fast R-T stage for mapping or measurement at individual coordinates
Research grade 300mm focal length spectrometer
Large numerical aperture optics, for high photon collection efficiency and low intensity detection capability
Up to 4 lasers (2 internal, 1 diode laser and 1 external) ranging from 213 nm - 1064 nm excitation wavelength
Up to 3 gratings for high resolution spectral PL mapping
Up to 2 detectors covering 200 nm to 2.6 μm
Integrated white light source for thickness and reflectance measurements
High speed non spectral mapping mode @ 2000 pps
High speed spectral mapping mode @ 200 pps
Optional Features
wafer bow measurement
Accucolor® real LED color determination
Overview® reactor statistics
multiple PL peak statistics
SECS-GEM factory automation