PL Mapping System

  • Product No:RPMBlue
  • Manufacturer:Nanometrics Inc.

The RPMblue/FS is designed to provide fast, accurate, precise and reliable PL metrology across the entire wavelength range. This includes from high-Al content AlGaN alloys for GaN FET’s and UV lasers/LED’s to communication laser applications in the NIR and everything in between. The RPMblue/FS offers a catalogue of more than 15 standard lasers and the ability to fiber-feed a virtually unlimited array of sources.

The research grade 300 focal length monochromator can be fitted with up to three gratings and two array detectors — and, once configured, every optical component is selected under computer control. To ensure the highest possible wavelength accuracy, the RPMblue/FS contains its own built-in spectral source for monochromator calibration.

Standard Features

  • Wafer Sizes ≤ 200mm and sample pieces

  • up to 80 wph @ 2 mm spatial resolution on 2” wafers

  • Optional fully automated wafer handling with up to 3 cassette station

  • Fast R-T stage for mapping or measurement at individual coordinates

  • Research grade 300mm focal length spectrometer

  • Large numerical aperture optics, for high photon collection efficiency and low intensity detection capability

  • Up to 4 lasers (2 internal, 1 diode laser and 1 external) ranging from 213 nm - 1064 nm excitation wavelength

  • Up to 3 gratings for high resolution spectral PL mapping

  • Up to 2 detectors covering 200 nm to 2.6 μm

  • Integrated white light source for thickness and reflectance measurements

  • High speed non spectral mapping mode @ 2000 pps

  • High speed spectral mapping mode @ 200 pps

Optional Features

  • wafer bow measurement

  • Accucolor® real LED color determination

  • Overview® reactor statistics

  • multiple PL peak statistics

  • SECS-GEM factory automation


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