Fully auto 200mm High Power Probe station

  • Product No:APS80 HV
  • Manufacturer:Wentworth Laboratories

The PegasusTM A200 series offers dual-end, parallel processing of wafers which optimizes wafer handling for maximum throughput.

Designed for easy access when manually loading and unloading wafers the PegasusTM A200 has a capacity of two cassettes, each containing 25 wafers.

Featuring a highly advanced, single-stage wafer detection pre-alignment and transportation system, the PegasusTM A200 ensures long-term accuracy and repeatability.

The PegasusTM A200 Series probers deliver menu-driven, push button control via proprietary LabMaster™ control and monitoring software.

An extensive range of control and monitoring parameters enable users to operate PegasusTM A200 Series probers at peak performance, including: realtime monitoring and test setup; yield analysis of both the wafer and batch under test; premium mapping capability; image analysis, and a host of other advanced features.

Configurable to voltages in excess of 5 kV for specialized applications Optional thermal chuck capability.

  • High throughput cassette to cassette automation.

  • Automatic wafer handling, pattern recognition and wafer probing.

  • Wafer pre-alignment and wafer detection.

  • Many automation options.

  • Customizable product enhancing hardware and software options.

  • Performance thermal chuck solutions.

  • Wide range of product enhancing accessories.

  • Robust mechanical design.


PROBER

  • XY STAGE Type :High precision re-circulating ball screws

  • Stage Travel: 210 mm x 210mm (8.3” X 8.3”)

  • Resolution: 1.25 μm

  • Accuracy: ± 7 μm over 200mm

  • Repeatability ± 4 μm

  • XY Speed: Up to 100 mm/s

  • Automatic Alignment Repeatability: ± 5 μm

WAFER HANDLER

  • ROBOT Speed :1270 mm/s (R), 254 mm/s (Z), 800 º/s (Ø) 

  • Positional Repeatability :12.7 μm (Z), 38.1 μm (R)0.01°(Ø) at constant

  • temperature Flat Orientation Selectable

  • Pre-Alignment Accuracy :± 63.5 μm ± 0.125º

  • Repeatability: ± 4 μm

  • XY Speed: Up to 100 mm/s