Electrostatic Force Microscope (EFM)

  • Product No:1100TN
  • Manufacturer:Trek, Inc.

The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution – better than 10 μm – which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.

Can be used in atmosphere conditions

Spatial resolution is better than 10 μm

Three measurement modes:

- Static

- Line Profile

- 3D Mapping


  • Measurement Range: 0 to ±1 kV DC

  • Spatial Resolution (Reference to input voltage with combshaped electrode: 60% of signal strength for 10 μm width

                                                                                                                                 70% of signal strength for 20 μm width

  • Separation between Detector Tip and Surface Under Test (Controlled with piezo stage in Z axis): Typically 5 μm

  • Accuracy: Better than 0.5% of full scale

  • Voltage Sensitivity: Better than 100 mV

  • Sampling Speed: 30 ms to 0.1 ms per data sample

  • Scanning Area

    X and Y Axis: ±15 mm with 1 μm resolution

    Z Axis Range: 0 to 5 mm

    Z Axis Piezo Stage Range: 0 to 80 μm with 1 μm accuracy

  • Optical System

    Laser Unit for Detecting Cantilever Distortion: Laser Diode 670 nm with detector photodiode

    Observation for Actual Measurement Point

    Light Source: Green LED

    Camera: CCD with 380k pixels

    Object Lens: 10X lens for 500 μm square under the monitor camera