MicroSense’s UltraMap 100 measurement system utilizes MicroSense proprietary backpressure, auto positioning probe technology to measure wafers of any material up to 200mm in diameter.
The system can measure wafers ranging from 50um to 3mm thick without any mechanical adjustment of the probe positions. Additionally, the system can measure wafers with high bow and warp.
The UltraMap is available as a standalone semi-automated measurement system or as a fully automated system with wafer handling robot and multiple input output cassettes.
Wide Measurement Range
•50um to 3mm thickness
•Warp range +/- 2500um
Precise accurate Measurements
•0.5um absolute accuracy
•Integrated calibration standards
•Air Bearing Stage for precise repeatable measurements
Production Friendly
•Sawn, Lapped and Polished wafers
•Non clean room environment
•Easy data export
| Measurement Parameters | Accuracy | Repeatability One Sigma | Resolution |
Thickness: Flat Wafers (<500um Bow) Thickness: Center, Minimum, Maximum, Average | 0.5μm | +/- 0.15 μm | 0.1μm |
Thickness: Bow > 500um and < 1000um Thickness: Center, Minimum, Maximum, Average | 1.5μm | +/- 0.25 μm | 0.1μm |
| Bow/Warp | 3μm + 1% range | +/- 3 μm | 0.1μm |
| Wafer Specifications | System Configuration |
| Wafer Size: 50mm, 100mm, 150mm, 200mm, and Custom Diameter Tolerance: +0.2mm, -0.5mm Thickness Range: 50μm - 3000μm Surfaces: Sawn, Lapped, Polished | Wafer Handling: Manual and Robotic Measurement Positioning: Precision Air Bearing Pre-aligner: Optional OCR Reader: Optional SECS/GEM: Optional Cassette Stations: Up to 6 Calibration: Automated Reliability (MTBF): 10,000 |
| Facilities Requirements |
| Dimensions: 63” wide (UMA) or 28.5” wide (UMS) + 22” swivel monitor, 34” deep, 65” tall Weight: 1000lbs – Fully automated system with 2 cassettes Voltage: 110V for US, 200 – 250V options available single phase grounded polarized outlet required Frequency: 50/60 Hz Current: 2A nominal, 10A peak Circuit Breaker: 10A UL489A certified breaker Air supply: Clean dry air or Nitrogen 40 – 60 PSI Fittings: ¼” compression fitting |
