Deep Level Transient Spectroscopy is an important technique for semiconductor research and detection of semiconductor impurities, deep defect levels and interface states. According to the transient state of the semiconductor PN junction, the transient capacitance (ΔC ~ t) of Schottky junction and the emissivity window of deep level transient spectrum (DLTS), the transient state spectrum of deep level is measured. Is a high sensitivity test method that can detect trace impurities in semiconductors, deep defects and interface states. By scanning the temperature of the sample, it is possible to give a DLTS spectrum that characterizes impurities, deep defect levels and interface states with temperature (ie, energy) distribution within the bandgap of the semiconductor.
Pulse generator voltage range ± 100v, resolution 0.3mV
Pulse width 1us-1000s
Capacitance measurement of high-frequency signal 1M Hz
Capacitance compensation range 1pF- 3300pF
HF-frequency: 1M Hz
HF-signal: 100mV
Capacitance test range 2pF, 20pF, 200pF, 2000pF, automatic or manual
Capacitance test sensitivity 0.01fF
Current amplifier maximum test current: 15mA
Current Amplifier Current Resolution 10pA
Digital transient recorder maximum sampling 64000 points
Digital transient recorder sampling interval 2us-4s
Coupling provides 28 kinds of coupling methods, including Boxcar and Lock-in. A temperature change to get 28 sets of curves and data points
Single Temperature Point Test Parameter Sequence Single Temperature Point Set 18 kinds of test parameter sequence, you can get different test parameters without repeated temperature change
Test mode C-DLTS (Capacitance DLTS)
CC-DLTS (Constant Capacitance DLTS, with CC option)
I-DLTS (Current DLTS)
Q-DLTS (Charge-DLTS)
FET DLTS (3 term DLTS 2 nd voltage source included as a standard)
DD-DLTS (Transient difference DLTS)
ITS (Isothermal Transient (C or I) Spectroscopy)
PICS (Photon induced transient (C or I) spectroscopy
Capture DLTS (capturing transient measurement)
Laplace-DLTS (Logarithmic transient measurements and evaluations)
MIS - Nss DLTS