Spectral reflection method, the use of built-in light source to produce 380nm-1000nm light and the use of grating after splitting the light through the fiber end of the lens, focusing it to form a 1mm diameter beam, perpendicular to the sample to be measured using the CCD detector to obtain reflection Spectral and transmission spectra, and calculate the film thickness accordingly
Spectral range 380nm - 1000nm
Optional up to 1700nm or down to 240nm
Spectral resolution 0.3-2nm
Full-band test reflectivity, there are hundreds of different wavelength reflectivity
Reflectance test repeatability 0.01%, @ 600nm
Refractive index test there
Test spot size 2 mm
Optional 24um or 60um, model FilmTek 1000M
Tungsten halogen light source, life expectancy up to 10000 hours
The strongest reflectance test function, the system automatically determine the strongest emissivity and test
Film thickness test range 10nm-150um
Test distance (thick substrate testing capabilities) Dedicated optical lens design, for thick film and thick substrate, can be directly compatible, the maximum thickness of the test can be extended to 350um
Thickness test accuracy ± 2Å for NIST traceable standard oxide 1000Å
Can test the number of layers to ensure that 3 layers and below, up to 6-8 layers
Reflectance test there
Reflectance test repeatability 0.01%, @ 600nm
Refractive index test there
Platform Standard: All solid-state platform, the largest compatible to 8inch,
Optional - software control multi-point move and draw multi-point atlas
